Optical Field Piezo Scanner with 50mm Aperture P-517/527
A multi-axis piezo scanner with zero friction that achieves nano-level positioning.
Positioning in the field of optics is a very important factor in high-precision measurement, inspection, and microfabrication. In particular, the adjustment of the position of optical components such as lenses and mirrors is a critical challenge that affects the performance of the system. Conventional mechanical positioning methods have limitations in accuracy due to friction and backlash, making high-precision positioning difficult in some cases. The P-517/527 multi-axis piezo scanner addresses these challenges in the positioning of optical components with its nano-level resolution and reproducibility. 【Application Scenarios】 - Optical inspection - Wafer inspection - Nano positioning - Measurement - Microscopy 【Benefits of Implementation】 - High-precision positioning with sub-nanometer resolution - Stable operation with frictionless flexure guides - High linearity with capacitive sensors - Capability for transmitted light measurement with a 50 x 50 mm aperture
- Company：PI Japan
- Price：Other
